发明名称 TEST SYSTEM AND ITS JUNCTION BOX
摘要 PROBLEM TO BE SOLVED: To provide a test system and a junction box for power supply and grounding which can reduce the influence of noise when a tester is used in a noisy environment together with an apparatus for handling/probing an object to be measured. SOLUTION: The test system 100 comprises a first grounding wire 164 which connects a first grounding terminal 166 of the tester to a second grounding terminal of a prober, a ground plane 160 which covers the bottom of the tester and the bottom of the prober and is connected to the first grounding terminal through a second grounding wire 162, a power terminal block 144 supplies the tester and prober with power, respectively, receives a first power wire 172 from a switchboard, and divides it into a second and third power wire (156, 158) for the tester and prober, respectively, and a grounding terminal block 148 which receives a third grounding wire 174 from the switchboard and is connected to the first grounding terminal through a fourth grounding wire 154. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006258490(A) 申请公布日期 2006.09.28
申请号 JP20050073601 申请日期 2005.03.15
申请人 AGILENT TECHNOL INC 发明人 KISHIDA AKITO
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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