发明名称 SUBSTRATE TRANSPORTING DEVICE, SUBSTRATE PROCESSING DEVICE, AND PLANE INDICATING DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress the cost for providing a substrate transporting device, processing device, etc. by using an existing facility unchangedly without requiring introducing a facility proprietary for inclined transportation, i.e. without necessity for replacing the existing facility with a new one. SOLUTION: The substrate transporting device 13 is equipped with a mounting plate 17 extending in the transporting direction of a mother glass B, a plurality of holders 18 installed in line in the longitudinal direction with respect to the mounting plate 17, and a shaft 20 furnished with rollers 21 supported rotatbly by the respective holders 18 through bearings 19 and able to transport the mother glass B. It is arranged for a spacer 25 to be interposed between the mounting plate 17 and each holder 18, and the mother glass B is made transportable in the inclined attitude by adjusting the mounting height of each holder 18 with the spacer 25. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006256768(A) 申请公布日期 2006.09.28
申请号 JP20050075585 申请日期 2005.03.16
申请人 SHARP CORP 发明人 SUKAI JUNICHI
分类号 B65G49/06;B65G13/12;G02F1/13;H01L21/677 主分类号 B65G49/06
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