摘要 |
A particle generator is able to generate pure particles for solid or liquid materials with melting points over several hundred degrees Celsius. The material is heated to generate the vapor in a small chamber. Heated nitrogen or some inert gas is used as the carry gas to bring the mixture into a dilution system. As the super saturation ratio of the material is large enough and over a critical value, particles are formed in the dilution system by homogenous nucleation, and grown in the same dilution system as well. The different size distributions and concentrations of the particles can be obtained by varying dilution parameters, such as residence time and dilution ratio. |