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发明名称
METHOD FOR DEPOSITING ?-NPB THIN LAYER WITH ALD
摘要
申请公布号
KR100629477(B1)
申请公布日期
2006.09.28
申请号
KR20050003302
申请日期
2005.01.13
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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