ACOUSTIC RESONATOR AND MONOLITHIC INTEGRATION OF ELECTRONIC CIRCUIT IN VERTICAL DIRECTION

摘要

PROBLEM TO BE SOLVED: To provide an inexpensively manufacturable monolithic integration device having satisfactory performance and sensitivity in which the forming processes of an acoustic resonator and an electronic circuit are sufficiently separated.

SOLUTION: The acoustic resonator and the electronic circuit are disposed vertically on a substrate, and an acoustic isolator and an isolation structure are disposed between the acoustic resonator and the electronic circuit. With the isolation structure, the electronic circuit is protected from an inconvenient effect produced in the manufacturing process of the acoustic resonator, etc.

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