ELEMENT MEASURING INSTRUMENT AND ELEMENT MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an element measuring instrument and an element measuring method smoothly separating elements without breaking a sample, capable of easily and accurately re-constructing three-dimensional element distribution of the sample. SOLUTION: An adsorption gas guiding mechanism 6 for guiding adsorption gas for assisting electric field evaporation of the element of the sample 11 is arranged on a 3DAP. A gas easily adsorbed on the element of the sample 11 (high adsorption rate) like nitrogen gas is selected. COPYRIGHT: (C)2006,JPO&NCIPI