| 摘要 |
PROBLEM TO BE SOLVED: To effectively prevent an error on a counting value of pulses from a direct encoder sensor from being generated at a joint of a scale adhered on a carrier belt in using the direct encoder sensor to directly read movement of the carrier belt by adhering the scale on the carrier belt. SOLUTION: The pulse counting value of the direct encoder sensor by which a counting error is not detected is adopted by abandoning the pulse counting value of the direct encoder sensor by which the counting error is detected when the counting error of the pulse counting value is detected by either one of the first and second encoder sensors 401, 402 in arranging the first encoder sensor 401 and the second direct encoder sensor 402 with a predetermined distance between them so that either one of them does not reach the joint 405 of the scale 404 when the other reaches the joint 405. COPYRIGHT: (C)2006,JPO&NCIPI
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