| 摘要 |
PROBLEM TO BE SOLVED: To provide a small type piezoelectric oscillating piece having a high-quality film structure without deteriorating a production efficiency, and to provide its manufacturing method. SOLUTION: In the manufacturing method of the piezoelectric oscillating piece, the piezoelectric oscillating piece is formed on a piezoelectric wafer through photolithography technique. The method comprises a profile forming process for forming the profile of the piezoelectric oscillating piece, a first metal film depositing process for depositing a first metal film by one metal among Cr, Ni, Al and Ti on the surface of the piezoelectric oscillating piece whose profile is formed, and a process for forming an electrode pattern on the first metal film. After effecting these processes, either one of a second metal film depositing process for depositing the second metal film for the weight of frequency adjusting unit of the piezoelectric oscillating piece or a protective film depositing process for depositing a protective film is effected in the next process. COPYRIGHT: (C)2006,JPO&NCIPI
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