发明名称 |
Nanoparticle structure and method of manufacturing the same |
摘要 |
The nanoparticle structure includes: a substrate; and nanoparticles formed on the substrate, wherein the nanoparticles include silicide. The method of manufacturing the nanoparticle structure includes: forming an Si source layer to a predetermined thickness; forming nanoparticles using a predetermined metal and silicon; depositing the nanoparticles on the Si source layer; and growing the nanoparticles to form silicide. Nanoparticles having a desired size can be easily obtained by adjusting the thickness of the silicon source layer.
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申请公布号 |
US2006216528(A1) |
申请公布日期 |
2006.09.28 |
申请号 |
US20060353983 |
申请日期 |
2006.02.15 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE JOO-HYUN;KHANG YOON-HO;LEE EUN-HYE |
分类号 |
B32B5/16;B05D3/02;C23C8/00 |
主分类号 |
B32B5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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