发明名称 Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit
摘要 Complementary metal oxide semiconductor integrated circuits may be formed with NMOS and PMOS transistors having different gate dielectrics. The different gate dielectrics may be formed, for example, by a replacement process. The gate dielectrics may differ in material, thickness, or formation techniques, as a few examples.
申请公布号 US2006214237(A1) 申请公布日期 2006.09.28
申请号 US20060418577 申请日期 2006.05.05
申请人 METZ MATTHEW V;DATTA SUMAN;KAVALIEROS JACK;DOCZY MARK L;BRASK JUSTIN K;CHAU ROBERT S 发明人 METZ MATTHEW V.;DATTA SUMAN;KAVALIEROS JACK;DOCZY MARK L.;BRASK JUSTIN K.;CHAU ROBERT S.
分类号 H01L29/94;H01L21/8238;H01L29/76 主分类号 H01L29/94
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