| 摘要 |
The method for determining the thickness of a dielectric layer according to the invention comprises the step of providing an electrically conductive body ( 11 ) having a dielectric layer ( 13 ) which is separated from the electrically conductive body ( 11 ) by at least a further dielectric layer ( 3 ) and a surface ( 15 ) of which is exposed. Onto the exposed surface ( 15 ) an electric charge is deposited, thereby inducing an electric potential difference between the exposed surface ( 15 ) and the electrically conductive body ( 11 ). An electrical parameter relating to the electric potential difference is determined and a measurement is performed to obtain additional measurement data relating to the thickness of the dielectric layer ( 13 ) and/or to the thickness of the further dielectric layer ( 3 ). In this way the thickness of the dielectric layer ( 13 ) and/or of the further dielectric layer ( 3 ) is determined. The method of manufacturing an electric device ( 100 ) comprises this method for determining the thickness of a dielectric layer. The apparatus ( 10 ) for determining the thickness of a dielectric layer is arranged to execute this method.
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