发明名称 |
METHOD OF FILM FORMATION, FILM FORMATION APPARATUS, PERMANENT MAGNET, AND PROCESS FOR PRODUCING PERMANENT MAGNET |
摘要 |
<p>A film is formed at a high rate on the surface of an iron-boron-rare-earth-metal magnet having a given shape, while effectively using dysprosium or terbium as a film-forming material. Thus, productivity is improved and a permanent magnet can be produced at low cost. A permanent magnet is produced through a film formation step in which a film of dysprosium is formed on the surface of an iron-boron-rare-earth-metal magnet of a given shape and a diffusion step in which the magnet coated is subjected to a heat treatment at a given temperature to cause the dysprosium deposited on the surface to diffuse into the grain boundary phase of the magnet. The film formation step comprises: a first step in which a treating chamber where this film formation is performed is heated to vaporize dysprosium which has been disposed in this treating chamber and thereby form a dysprosium vapor atmosphere having a given vapor pressure in the treating chamber; and a second step in which a magnet kept at a temperature lower than the internal temperature of the treating chamber is introduced into this treating chamber and the dysprosium is selectively deposited on the magnet surface based on a temperature difference between the treating chamber and the magnet until the magnet temperature reaches a given value.</p> |
申请公布号 |
WO2006100968(A1) |
申请公布日期 |
2006.09.28 |
申请号 |
WO2006JP305034 |
申请日期 |
2006.03.14 |
申请人 |
ULVAC, INC.;NAGATA, HIROSHI;SHINGAKI, YOSHINORI |
发明人 |
NAGATA, HIROSHI;SHINGAKI, YOSHINORI |
分类号 |
C23C14/54;C23C14/22;H01F1/053;H01F10/12;H01F41/20 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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