PROBE CARD OF VERTICALLY BUFFERING TYPE

摘要

A vertical buffer type probe card is provided to prevent the damage of a pad of a semiconductor chip by using an improved buffering mechanism. A vertical buffer type probe card includes a reinforcing plate(101) with a plurality of holes; a PCB(Printed Circuit Board)(100) under the reinforcing plate; a ceramic structure(104) under the PCB; a planarization controlling unit(103) for aligning the reinforcing plate, PCB, and ceramic structure with each other; a vertical probe vertically inserted into the ceramic structure from the PCB; a ceramic disc; an aligning rod. The ceramic disc(106) is installed under the ceramic structure. The ceramic disc includes a plurality of holes. The aligning rod(105) is used for connecting vertically the PCB with the ceramic structure.