| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To achieve the mass production of products having higher durability with cost lower than that of a related art by manufacturing a phase shifter for controlling a phase of light by a process reduced in variation. <P>SOLUTION: The manufacturing method of a phase shifter optical element sequentially comprises, to manufacture a products having an ultra-fine surface structure, steps of (A) transferring an inverted shape of the surface of a metal die by pressing a product substrate to the surface of the metal die having the ultra-fine surface shape on the surface thereof via a transfer material which may be hardened, (B) hardening the transfer material, and (C) peeling the transfer material from the metal die in a state that the transfer material is joined to the product substrate. The manufactured product is the phase shifter optical element having a fine pattern formed by the repetition of a projection and a recess on the surface thereof. The preferable transfer material is, for example, a hydrogen silsesquioxane material, a solgel material, or an organic/inorganic hybrid material. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
