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发明名称
摘要
申请公布号	JP3827983(B2)	申请公布日期	2006.09.27
申请号	JP20010291522	申请日期	2001.09.25
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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