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发明名称
DRY ETCHING EQUIPMENTS FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060101967(A)
申请公布日期
2006.09.27
申请号
KR20050023645
申请日期
2005.03.22
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, SANG WOUN;SEO, BYONG KYU
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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