发明名称 Ultrasonic cleaning device for removing undesirable particles from an object
摘要 A cleaning device for cleaning an object includes an inner vessel configured to contain a first liquid and the object. The cleaning device also includes an external vessel configured to contain a second liquid and the inner vessel. The second liquid is acoustically coupled to the first liquid. At least one transducer is acoustically coupled to the external vessel and configured to generate acoustical energy which is transferred to the object through the external vessel, a second liquid, the inner vessel and the first liquid. The first liquid has a dissolved gas concentration of a first gas and the second liquid has a dissolved gas concentration of a second gas.
申请公布号 US7111632(B2) 申请公布日期 2006.09.26
申请号 US20030667997 申请日期 2003.09.22
申请人 SEAGATE TECHNOLOGY LLC 发明人 BERMAN RICHARD JONATHAN;AXDAL STEVEN HARLOW ANDERSON;HOLTZ ALLAN RAY;WOLDU JORDAN YOUDANOS
分类号 B08B3/12;H01L21/00;H01L21/306 主分类号 B08B3/12
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