发明名称 |
Method and apparatus for dynamically measuring the thickness of an object |
摘要 |
A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a portion of the test object through the gap. The sensor heads make measurements at given sampling locations on the test object as the test object is moved through the gap. The apparatus also includes a position sensing mechanism to determine positions of the sampling locations on the test object. The apparatus also includes an evaluation circuit in communication with the eddy current sensor and to the position sensing mechanism for determining the thickness of the test object at the sampling locations.
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申请公布号 |
US7112961(B2) |
申请公布日期 |
2006.09.26 |
申请号 |
US20030685210 |
申请日期 |
2003.10.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LEI LAWRENCE C.;LU SIQING;CHANG YU;MARTNER CECILIA;PHAM QUYEN;GU YU PING;HUSTON JOEL;SMITH PAUL;MILLER GABRIEL LORIMER |
分类号 |
G01B7/06;G01N27/72 |
主分类号 |
G01B7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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