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发明名称
SEMICONDUCTOR PROCESS FLOW FOR NAND FLASH MEMORY PRODUCTS
摘要
申请公布号
KR100627928(B1)
申请公布日期
2006.09.25
申请号
KR20017006976
申请日期
2001.06.04
申请人
发明人
分类号
H01L27/115;H01L21/8247;H01L29/788
主分类号
H01L27/115
代理机构
代理人
主权项
地址
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