| 发明名称 |
TEST DE L'ETANCHEITE DE MEMS OU DE PETITS COMPOSANTS ENCAPSULES |
| 摘要 |
A tightness testing method for a MEMS or small encapsulated component, the MEMS or small component being housed in a cavity of a carrier. The cavity being sealed and containing a gas having a different density to the density it would have if subjected to the pressure of the medium outside the cavity. The method measures the density of the gas contained in the cavity. |
| 申请公布号 |
FR2872572(B1) |
申请公布日期 |
2006.09.22 |
| 申请号 |
FR20040051370 |
申请日期 |
2004.06.30 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL |
发明人 |
DE CRECY FRANCOIS;DIEM BERNARD |
| 分类号 |
G01M3/02;B81C99/00;G01L21/12;G01M3/00 |
主分类号 |
G01M3/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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