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发明名称
METHOD FOR MANUFACTURING THIN FILM SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING DISPLAY, METHOD FOR MANUFACTURING THIN FILM TRANSISTOR, AND METHOD FOR FORMING SEMICONDUCTOR THIN FILM
摘要
申请公布号
KR100627181(B1)
申请公布日期
2006.09.22
申请号
KR20017000659
申请日期
2001.01.16
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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