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发明名称
Verfahren zum Betrieb von Ultrahochvakuum-Pumpanlagen
摘要
申请公布号
AT221296(B)
申请公布日期
1962.05.10
申请号
AT19600003096
申请日期
1960.04.23
申请人
BALZERS AKTIENGESELLSCHAFT FUER HOCHVAKUUMTECHNIK UND DUENNE SCHICHTEN
发明人
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主分类号
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