| 摘要 |
PROBLEM TO BE SOLVED: To restrict oscillation of an oscillator in a width direction without an additional excessive cost in production. SOLUTION: Backing material 21 and a piezoelectric element 25 constitute an ultrasonic transducer array 10, and are bonded with silver paste 27. The side face 25a of the bottom of the piezoelectric element 25 is surrounded with the silver paste 27. In the fabrication of the ultrasonic transducer array 10, a uniform film (about 30μm, 10-20% of thickness of piezoelectric element 25) of silver paste 27 is formed on the backing material 21 first of all by using squeegee, doctor blade or screen printing method, and a wafer of the piezoelectric element 25 subjected to sub-dice process with an individual electrode formed therein is buried thereon, and the silver paste 27 is hardened. In this way, the side face 25a of the bottom of the piezoelectric element 25 is surrounded with the silver paste 27. COPYRIGHT: (C)2006,JPO&NCIPI |
