| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment method capable of so cutting out chips thereby as to make the sizes of the chips accurately uniform. SOLUTION: The alignment method includes a step (S102) for photographing firstly alignment patterns 110 given in the central positions of a plurality of chip regions; a step (S104) for extracting then as a reference column 112 an arbitrary column wherein the plurality of alignment patterns 110 are arranged nearly in parallel with each other in the X-axis direction, based on the plurality of photographed alignment pattern 110 and by a recognizing means, while presuming that there are a plurality of columns wherein the plurality of alignment patterns 110 arranged nearly in parallel with each other in the X-axis direction; a step (S110) for measuring further sequentially the spaces between the adjacent columns which are arranged plurally in the Y-axis direction; a step (S120) for calculating the positions in the Y-axis direction of the plurality of measured columns, based on the measured spaces; a step (S130) for determining thereafter as cutting-line positions the positions separated from the positions of references by previously set distances, by using as the references the respective calculated positions in the Y-axis direction; and a step (S140) for aligning a cutting blade 22 with the cutting-line positions. COPYRIGHT: (C)2006,JPO&NCIPI |
