PRECISELY PROCESSED ELECTROCONDUCTIVE GLASS MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a glass member such as an electrode in a system treating charged particles, e.g. a plasma generating device used for etching; which has high dimension accuracy and is free from risk of electrostatic breakdown caused by the accumulation of electric charges, or the like. SOLUTION: The precisely processed electroconductive glass member is obtained by processing electroconductive vanadate glass containing vanadium oxide as main component and having electrical conductivity of≥1×10-8S/cm by irradiating it with an ion beam or a laser beam. COPYRIGHT: (C)2006,JPO&NCIPI