发明名称 |
Diffusion barrier coatings having graded compositions and devices incorporating the same |
摘要 |
Disclosed is a composite article and methods for making a composite article where the composite article includes a coating material formed from an organic material having a first refractive index and an inorganic material having a second refractive index where the refractive indexes match. The methods may include depositing the coating using a plasma-enhanced chemical-vapor deposition technique. The methods may further include varying the deposition rate of one or both of the organic and inorganic material so as to match the refractive indexes.
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申请公布号 |
US2006208634(A1) |
申请公布日期 |
2006.09.21 |
申请号 |
US20060378480 |
申请日期 |
2006.03.20 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
SCHAEPKENS MARC;FLANAGAN KEVIN W. |
分类号 |
H01J1/62;H05B33/02;B32B5/14;C23C16/30;H01L51/50;H01L51/52;H05B33/04;H05B33/12;H05B33/24 |
主分类号 |
H01J1/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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