发明名称 Diffusion barrier coatings having graded compositions and devices incorporating the same
摘要 Disclosed is a composite article and methods for making a composite article where the composite article includes a coating material formed from an organic material having a first refractive index and an inorganic material having a second refractive index where the refractive indexes match. The methods may include depositing the coating using a plasma-enhanced chemical-vapor deposition technique. The methods may further include varying the deposition rate of one or both of the organic and inorganic material so as to match the refractive indexes.
申请公布号 US2006208634(A1) 申请公布日期 2006.09.21
申请号 US20060378480 申请日期 2006.03.20
申请人 GENERAL ELECTRIC COMPANY 发明人 SCHAEPKENS MARC;FLANAGAN KEVIN W.
分类号 H01J1/62;H05B33/02;B32B5/14;C23C16/30;H01L51/50;H01L51/52;H05B33/04;H05B33/12;H05B33/24 主分类号 H01J1/62
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