发明名称 |
Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program |
摘要 |
An atmospheric transfer chamber, connected to an object processing chamber for processing a target object by using a plasma of a halogen-based gas, for transferring the target object therein, the atmospheric transfer chamber includes a dehumidifying unit for dehumidifying air in the atmospheric transfer chamber. The dehumidifying unit includes a desiccant filter, a cooling unit for cooling the air introduced into the atmospheric transfer chamber, and an air conditioner. The atmospheric transfer chamber is connected to a reaction product removal chamber for removing reaction products of a halogen-based gas attached to the target object, wherein halogen in reaction products attached to the target object is reduced.
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申请公布号 |
US2006207971(A1) |
申请公布日期 |
2006.09.21 |
申请号 |
US20060376163 |
申请日期 |
2006.03.16 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MORIYA TSUYOSHI;HIROOKA TAKAAKI;SHIMIZU AKITAKA;TANAKA SATOSHI |
分类号 |
C23F1/00;B44C1/22;H01L21/306 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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