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发明名称
WAFER EDGE DETECTOR
摘要
申请公布号
KR20060100755(A)
申请公布日期
2006.09.21
申请号
KR20050022515
申请日期
2005.03.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, DONG BOCK
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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