| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an insulating film of low permittivity being employed in an electronic device in which aging of dielectric constant is insignificant, and to provide its production method and an electronic device having that insulating film. <P>SOLUTION: In the insulating film being formed by applying a composition for forming a film containing a compound having a cage structure and then thermally drying the composition, the composition is thermally dried in an atmosphere of oxidizing gas having concentration of 100 ppm or less. Its production method and an electronic device are also provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
