| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized micro-machine switch capable of obtaining a good prevention characteristics at a plurality of frequency band, which can be formed into small-size and simple structure. SOLUTION: The micro-machine switch is composed of a base plate 2; a high frequency signal line 3 formed on a first area A on the base plate 2; a driving electrode 4 formed on a second area B arranged in close proximity to the first area A on the base plate 2; and a movable piece 6 arranged on the high frequency signal line 3 and the driving electrode 4 through dielectrics 51, 52 respectively, contacting the dielectric 51 arranged on the driving electrode 4 by the impression of a first voltage V1 between the driving electrode 4 and itself, and contacting the dielectric 52 arranged on the high frequency signal line 3 by the impression of a second voltage V2 between the high frequency signal line 3 and itself. COPYRIGHT: (C)2006,JPO&NCIPI
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