发明名称 SURFACE TREATMENT METHOD FOR COPPER AND COPPER
摘要 PROBLEM TO BE SOLVED: To provide a surface treatment method for copper by which adhesive strength between a copper surface and insulating layer is secured without forming ruggedness of >1μm on the copper surface, and insulation reliability between wiring therefore can be improved, and to provide copper. SOLUTION: The surface treatment method for copper comprises: a step where a metal nobler than copper is formed on a copper surface; and a step where the copper surface is subjected to oxidation treatment. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006249519(A) 申请公布日期 2006.09.21
申请号 JP20050069058 申请日期 2005.03.11
申请人 HITACHI CHEM CO LTD 发明人 YAMASHITA TOMOAKI;INOUE YASUO;MATSUURA MASAHARU;ITO TOYOKI;SHIMIZU AKIRA;INOUE FUMIO;NAKASO AKISHI
分类号 C23C22/78;C23C22/63;C23C22/83 主分类号 C23C22/78
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