| 摘要 |
PROBLEM TO BE SOLVED: To increase the sensitivity and S/N ratio of a piezoelectric element and reduce the size, costs, and temperature drift of the entire pressure sensor by increasing the amount of generated charge in the piezoelectric element up to its maximum area. SOLUTION: To construct the pressure sensor 1 having a sensor section 2 using the piezoelectric element C made of a single crystalline material, Langatate (La<SB>3</SB>Ta<SB>0.5</SB>Ga<SB>5.5</SB>O<SB>14</SB>:LTG) is used as the piezoelectric element C, wherein a cutting angleθwith respect to the y-axis deviated in the yz plane about the crystallographic x-axis, which is an angle when cutting the single crystal, is selected to be in the range of 5°≤θ≤30°. COPYRIGHT: (C)2006,JPO&NCIPI
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