| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoemission electron microscope improved so as to be able to be focused surely and highly accurately in a short time. SOLUTION: This photoemission electron microscope is equipped with an ion source or an electron beam source for marking by irradiating a focused ion beam or an electron beam to a part close to an observation portion on the sample surface. COPYRIGHT: (C)2006,JPO&NCIPI
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