| 摘要 |
A shower head is provided to restrain the generation of unwanted residues due to a predetermined reaction between leaked gas and predetermined gas by using a second plate with an improved port structure. A shower head includes a first plate, a second plate and a plurality of port fixing members. The first plate has a recessed space under the center and a first through hole(111) vertically prolonged from the recessed space. The second plate(130) is installed under the first plate. The second plate has a port(140). The port of the second plate is inserted into the recessed space of the first plate. The port includes a body, a plurality of protruded members(146) on the body, and a first path connected through the first through hole. The plurality of port fixing members(152) are installed on a lower surface of the first plate in order to support the plurality of protruded members.
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