发明名称 |
A FLEXIBLE NANO-IMPRINT STAMP |
摘要 |
The present invention relates to a nano-imprinting stamp for imprinting nanometer-sized to mm-sized structures, the stamp (1) having a base part and a first and a second imprinting section (2,3), the first and second impríntíng sections having a lithographic pattern (7) intended for imprinting in a receiving substrate. In a first aspect, the first and the second. imprinting sections (2,3) are independently displaceable in a direction substantially parallel to an imprinting direction of the imprinting stamp. In a second aspect, the first and the second imprinting sections (2,3) are mechanically weakly coupled in a direction substantially parallel to an imprintíng direction of the imprinting stamp. The stamp limits the effect of imperfections in or on the substrate to be imprinted with a lithographic pattern (7) and imperfections in or on the stamp and any combinations of such imperfections by localising the bending of the stamp to the base part (5) in-between the imprinting sections (2,3).
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申请公布号 |
WO2006026993(A9) |
申请公布日期 |
2006.09.21 |
申请号 |
WO2005DK00570 |
申请日期 |
2005.09.07 |
申请人 |
DANMARKS TEKNISKE UNIVERSITET;NIELSEN, THEODOR;KRISTENSEN, ANDERS;HANSEN, OLE |
发明人 |
NIELSEN, THEODOR;KRISTENSEN, ANDERS;HANSEN, OLE |
分类号 |
G03F7/00;B81C1/00;B82B3/00 |
主分类号 |
G03F7/00 |
代理机构 |
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主权项 |
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