| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning device capable of suppressing a positional variation of an interferometer without increasing the weight of a chamber and upsizing the chamber. <P>SOLUTION: The positioning device comprises the chamber 1 composed of a top plate 30, a bottom plate 32, and a plurality of side plates 8 and made a closed space therein; a light source 2 disposed outside the chamber 1; a movable stage 4 housed in the chamber 1; and the interferometers 6a, 6b disposed in the chamber 1. In the positioning device, the interferometer 6a is mounted on an inner wall surface 24b of the side plate 8b adjacent to the side plate 8a facing the light source 2, the interferometer 6b is mounted on the inner wall surface 24a of the side plate 8a via an interferometer support member 26, and the interferometer support member 26 is mounted on the inner wall surface 24a via four mounting positions 28 respectively set in the vicinity of corners of the inner wall surface 24a in the inner wall surface 24a of the side plate 8a. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
