NANO-WIRES AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing nano-wires which are grown by controlling diameters and distribution of nano-wires, and nano-wires accurately grown using the method. SOLUTION: The method of manufacturing the nano-wires includes (1) a step for forming microgrooves having a plurality of microcavities regularly on the surface of a silicon substrate, (2) a step for forming a metal layer on the silicon substrate by depositing a material which acts as a catalyst to form nano-wires on the silicon substrate, (3) a step for agglomerating the metal layer within the microgrooves on the surface of the silicon substrate by heating the metal layer to form catalysts and (4) a step for growing the nano-wires between the catalysts and the silicon substrate using a thermal process. COPYRIGHT: (C)2006,JPO&NCIPI