| 摘要 |
PROBLEM TO BE SOLVED: To easily inspect a defect in a transparent and flat product, such as an optical film and a liquid crystal panel. SOLUTION: An inspection device comprises: a pair of polarizers 1, 2 arranged by sandwiching the transparent and flat product 15 to be inspected; an illumination light source 4 for lighting the object 15 to be inspected through one of the polarizers 1, 2; a phase piece 3 arranged between one polarizer 1 and the object 15 to be inspected; a detection means 8 for detecting transmission light emitted from the other polarizer 2 of a pair of polarizers by applying illumination light from the illumination light source 4; and an operation means 10 for calculating an evaluation value from transmission light data detected by the detection means 8 and for independently controlling an angleθ1 of the optical axis of the polarizer 1 and an angleθ2 of the optical axis of the phase piece 3 in a direction where the evaluation value increases. COPYRIGHT: (C)2006,JPO&NCIPI
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