| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head having an electrostatic actuator wherein the structure of the head can be downsized, and a large displacement can be achieved with a small voltage by increasing electrostatic force of a diaphragm actuator to increase an ink discharge pressure. SOLUTION: This invention relates to an inkjet head having an electrostatic actuator and a manufacturing method thereof. The inkjet head having the electrostatic actuator including a moving element has a comb-like stator in which a plurality of first protrusion parts and second protrusion parts are formed in both directions, and a mover including a first member and a second member which are connected to the diaphragm each at one end part thereof, where in the first member, a plurality of third protrusion parts which are faced to the first protruding parts and meshed with them without making contact with them are formed, and in the second member, a plurality of fourth protrusion parts which are faced to the second protruding parts and meshed with them without making contact with them are formed. Thus, the structure of the head can be downsized, and a large displacement can be obtained with a small voltage by increasing the electrostatic force of the diaphragm actuator so as to increase the ink discharge pressure. COPYRIGHT: (C)2006,JPO&NCIPI
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