| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide which includes neither an air bubble nor colored matter and has superior optical characteristics. SOLUTION: In the method for manufacturing the optical waveguide, which is composed of a lower clad layer, a core layer and an upper clad layer, and in which at least one of them, especially, the core layer is a polyimide fluoride layer, the polyimide fluoride layer is formed by a vapor-deposition polymerizing method of carrying out polymerization while heating a vacuum processing chamber, a vacuum exhaustion system pipe, and an introduction pipe for raw-material monomer vapor. The core layer made of polyimide fluoride has a transmission loss of 6.0 dB/cm (provided that a light source wavelength is 632.8 nm) measured by a light scattering method. COPYRIGHT: (C)2006,JPO&NCIPI |
