| 摘要 |
PROBLEM TO BE SOLVED: To solve a following weakness of a device for detecting a magnetic field, where a magnetic field generation source in a minute area cannot be specified accurately, since generally a trade-off relation between its sensitivity and spatial resolution exists in the device. SOLUTION: An electromagnetic probe 6, having both high resolution and high sensitivity, is obtained, by connecting an amplifier 8 for performing differential amplification of the signals of a miniaturized magnetic-field detecting differential coil 7 to its vicinity. Consequently, electric field components are suppressed, and only the magnetic field components are detected, by using a structure such as a shielded loop for electric field shielding. Moreover, arraying of high-resolution probes for measuring a minute area, which is difficult in a conventional system, is easily performed by using a semiconductor process, and more detailed analysis, such as accelerating of measurement, and measurement of transient magnetic-field distribution, becomes available with one-dimensional arraying. COPYRIGHT: (C)2006,JPO&NCIPI
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