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发明名称
PROBE UNIT FOR TEST
摘要
申请公布号
KR20060100815(A)
申请公布日期
2006.09.21
申请号
KR20050022638
申请日期
2005.03.18
申请人
PARK, IN JAE;LEE, GEON BUM;KIM, HYUNG IK
发明人
PARK, IN JAE;KIM, HYUNG IK;LEE, GEON BUM
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
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