| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diamond film having high surface smoothness and high conductivity, its manufacturing method, an electrochemical element that employs the diamond film as an electrode material, has high sensitivity, and is of low cost, and to provide its manufacturing method. <P>SOLUTION: In the diamond film synthesized on a substrate, the peak intensity ratio corresponding to (220) and (111) of crystal faces (Miller indices) obtained by X-ray diffraction, namely (220)/(111), is 0.4 or less. This diamond film can be manufactured using raw material gas containing hydrocarbon, hydrogen, and nitrogen source gas by a CVD method where the flow ratio of a nitrogen source gas to hydrocarbon is 0.04 or more. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
