VIBRATION ISOLATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vibration isolating device of active type capable of exerting an enhanced vibration eliminating performance using an air damper.

SOLUTION: The vibration isolating device having the air damper 43 to support a structure 16 and a servo valve 47 to control its internal pressure differentiates the position information of the structure 16 sensed by a position sensor 49, generates a signal obtained by multiplying the differential by the specified gain, and positively feeds back the signal to a drive signal for the servo valve 47 in order to eliminate resonance/anti-resonance due to a flow rate feedback part 75 resulting from the volume change speed of the air damper 43 determined from the speed of the structure 16 and the effective pressure receiving area Aoof the air damper 43.

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