| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak detector and a leakage test method capable of implementing leakage tests of test body for shorter time. SOLUTION: The leak detector and the leakage test method, in which a primary pump is connected to the exhaust port of a secondary pump exhausting analyzer tubes through a first valve, and connecting test ports, connecting test bodies, with the intermediate stage port of the secondary pump and the inlet port of primary pump, respectively, through a second valve and a third valve, the leaked gas is detected through an intermediate stage induction manner, is characterized by including a manometer measuring the pressure of test bodies, a timer measuring time required to exhaust until the first pressure, when the test body is exhausted only with the primary pump, and a control means discriminating whether the exhaust air until the indication of manometer becomes to the second pressure corresponding to the pressure the analyzer tube is operatable is performed with the primary pump or the second pump after the analyzer tube is once turned off, on the basis of the output of timer. COPYRIGHT: (C)2006,JPO&NCIPI
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