发明名称 Method for Manufacturing Gold Bumps
摘要 A method for manufacturing gold bumps includes providing a substrate including a patterned protective layer, which exposes at least a bonding pad, on a surface, covering a photo resist on the surface of the substrate, performing a photolithography process to pattern the photo resist for exposing a portion of the protective layer and the bonding pad, removing a portion of the protective layer, removing the photo resist, and performing a gold bumping process. The resulting thickness of the protective layer covering the bonding pad is smaller than the resulting thickness of the protective layer covering the substrate.
申请公布号 US2006211232(A1) 申请公布日期 2006.09.21
申请号 US20050907005 申请日期 2005.03.16
申请人 发明人 LIU MEI-JEN;LAI YU-TING;LEE KUANG-SHIN;TUNG MING-TSUNG
分类号 H01L21/44 主分类号 H01L21/44
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