发明名称 DRIVE AND MECHANICAL PROBE DRIVE
摘要 <P>PROBLEM TO BE SOLVED: To provide a drive using a sheared displacement type piezoelectric actuator capable of precisely moving a movement member by a desired distance. <P>SOLUTION: A plurality of piezoelectric actuators are divided into at least two groups. In a low-speed movement mode, both the piezoelectric actuators are displaced synchronously. In a high-speed return mode, both the groups of piezoelectric actuators are asynchronously returned to an original state, where displacement is zero. Therefore, when the first group of piezoelectric actuators returns to the original state speedily, the movement member is held by the second group of piezoelectric actuators. When the second group of piezoelectric actuators returns to the original state, the movement member is held by the first group of the piezoelectric actuators. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006254595(A) 申请公布日期 2006.09.21
申请号 JP20050067644 申请日期 2005.03.10
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SATO HIROBUMI;YAMADA OSAMU;KAWAMATA SHIGERU
分类号 H02N2/00 主分类号 H02N2/00
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