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发明名称
Anordnung zum Tragen eines Substrates während eines angepassten Schneidverfahrens
摘要
申请公布号
DE69930068(T2)
申请公布日期
2006.09.21
申请号
DE19996030068T
申请日期
1999.09.02
申请人
TOWA CORP.
发明人
TIEBER, ALOIS
分类号
H01L21/304;B28D5/00;H01L21/301;H01L21/68;H01L21/78
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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