| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro mirror element that can suppress expansion of its size incidental to increase in the number of mirror faces. SOLUTION: The micro mirror element is composed of: a micro mirror substrate 100 in which a frame 130, a movable part with mirrors 110, and a torsion bar 150 connecting the frame 130 with the movable part are formed; a wiring substrate 200 in which a wiring pattern 210 is formed; and electrically conductive spacers 300 which serve to electrically connect the frame 130 and the wiring pattern 210 while isolating the micro mirror substrate 100 and the wiring substrate 200. The electrically conductive spacers 300 are composed of a plurality of stacked bumps. COPYRIGHT: (C)2006,JPO&NCIPI |
