发明名称 METHOD AND APPARATUS FOR MANUFACTURING STRUCTURE OF BRITTLE MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a structure of a brittle material, which can form a filmy body made from a brittle material without needing a reduced pressure environment, and to provide a manufacturing apparatus therefor. SOLUTION: The method for manufacturing the structure of the brittle material includes spouting an aerosol containing fine particles dispersed in a gas from a nozzle to a substrate, while relatively displacing the nozzle with respect to the substrate, so that the aerosol intermittently collides with the substrate to form the composite structure of the substrate and the structure of the brittle material made from the fine particles. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006249461(A) 申请公布日期 2006.09.21
申请号 JP20050064484 申请日期 2005.03.08
申请人 TOTO LTD 发明人 MIZUKANE MASAHIRO;HATONO HIRONORI
分类号 C23C24/04 主分类号 C23C24/04
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